9030.40 | | Other instruments and apparatus |
9030.82 | | For measuring or checking semiconductor wafers or devices |
9030.82 | 010 | - Character measuring testers |
9030.82 | 090 | - Other |
9030.84 | 000 | Other, with a recording device |
9030.89 | | Other |
9030.89 | 091 | - Spectrum analyzers |
9030.89 | 099 | - Other |
9030.90 | 000 | Parts and accessories |
90.31 | | Measuring or checking instruments, appliances and machines, not specified or included elsewhere in this Chapter; profile projectors |
9031.10 | 000 | Machines for balancing mechanical parts |
9031.20 | 000 | Test benches |
9031.20 | | Other optical instruments and appliances |
9031.41 | 000 | For inspecting semiconductor wafers or devices or for inspecting photomasks or reticles used in manufacturing semiconductor devices |
9031.49 | 000 | Other |
9031.80 | | Other instruments, appliances and machines |
9031.80 | | - Of electrical type |
9031.80 | 011 | -- Automatic measuring instruments |
9031.80 | 013 | -- Vibration measuring and testing apparatus |
9031.80 | 019 | -- Other |
9031.80 | 090 | - Other |
9031.90 | | Parts and accessories |
9031.90 | 010 | - Of electrical instruments and apparatus |