| 8486.10 | 000 | Machines and apparatus for the manufacture of boules or wafers |
| 8486.20 | 000 | Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits |
| 8486.30 | 000 | Machines and apparatus for the manufacture of flat panel displays |
| 8486.40 | 000 | Machines and apparatus specified in Note 9 (C) to this Chapter |
| 8486.90 | 000 | Parts and accessories |
