| 9031.10 | 000 | Machines for balancing mechanical parts |
| 9031.20 | 000 | Test benches |
| 9031.20 | | Other optical instruments and appliances |
| 9031.41 | 000 | For inspecting semiconductor wafers or devices or for inspecting photomasks or reticles used in manufacturing semiconductor devices |
| 9031.49 | 000 | Other |
| 9031.80 | | Other instruments, appliances and machines |
| 9031.80 | | - Of electrical type |
| 9031.80 | 011 | -- Automatic measuring instruments |
| 9031.80 | 013 | -- Vibration measuring and testing apparatus |
| 9031.80 | 019 | -- Other |
| 9031.80 | 090 | - Other |
| 9031.90 | | Parts and accessories |
| 9031.90 | 010 | - Of electrical instruments and apparatus |
| 9031.90 | 090 | - Other |
