| 9031.41.00 | | Other optical instruments and appliances: | | | | |
| 9031.41.00 | | For inspecting semiconductor wafers or devices or for inspecting photomasks or reticles used in manufacturing semiconductor devices | | Free | | 50% |
| 9031.41.00 | 20 | For inspecting photomasks or reticles used in manufacturing semiconductor devices | No. | | | |
| 9031.41.00 | 40 | For inspecting semiconductor wafers or devices: | | | | |
| 9031.41.00 | 40 | For wafers | No. | | | |
| 9031.41.00 | 60 | Other | No. | | | |
