| 9031.41.00 | | For inspecting semiconductor wafers or devices or for inspecting photomasks or reticles used in manufacturing semiconductor devices | | Free | | 50% |
| 9031.41.00 | 20 | For inspecting photomasks or reticles used in manufacturing semiconductor devices | No. | | | |
| 9031.41.00 | 40 | For inspecting semiconductor wafers or devices: | | | | |
| 9031.41.00 | 40 | For wafers | No. | | | |
| 9031.41.00 | 60 | Other | No. | | | |
| 9031.49 | | Other: | | | | |
| 9031.49.10 | 00 | Profile projectors | X | 2.5% | Free (A,AU,BH,CA, CL,E,IL,J,JO, MA,MX,P,SG) | 45% |
| 9031.49.40 | 00 | Coordinate-measuring machines | No. | 3.5% | Free (A,AU,BH,CA, CL,E,IL,J,JO, MA,MX,P,SG) | 50% |
| 9031.49.70 | 00 | For inspecting masks (other than photomasks) used in manufacturing semiconductor devices; for measuring surface particulate contamination on semiconductor devices | No. | Free | | 50% |
| 9031.49.90 | 00 | Other | X | 3.5% | Free (A,AU,BH,CA, CL,E,IL,J,JO, MA,MX,P,SG) | 50% |
| 9031.80 | | Other instruments, appliances and machines: | | | | |
| 9031.80.40 | 00 | Electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles | No. | Free | | 40% |
| 9031.80.80 | | Other | | 1.7% | Free (A,AU,B,BH, C,CA,CL,E,IL,J, JO,MA,MX,P, SG) | 40% |
| 9031.80.80 | 60 | Equipment for testing the characteristics of internal combustion engines: | | | | |
| 9031.80.80 | 60 | For testing electrical characteristics | X | | | |
| 9031.80.80 | 70 | Other | X | | | |
| 9031.80.80 | 85 | Other | X | | | |
| 9031.90 | | Parts and accessories: | | | | |
| 9031.90.20 | 00 | Of profile projectors | X | 2.5% | Free (A,AU,BH,CA, CL,E,IL,J,JO, MA,MX,P,SG) | 45% |
| 9031.90.45 | 00 | Of other optical instruments and appliances, other than test benches: | | | | |
| 9031.90.45 | 00 | Bases and frames for the coordinate-measuring machines of subheading 9031.49.40 | X | 3.5% | Free (A,AU,BH,CA, CL,E,IL,J,JO, MA,MX,P,SG) | 50% |
| 9031.90.54 | 00 | Of optical instruments and appliances of subheading 9031.41 or 9031.49.70 | X | Free | | 50% |
| 9031.90.58 | 00 | Other | X | 3.5% | Free (A,AU,BH,CA, CL,E,IL,J,JO, MA,MX,P,SG) | 50% |
| 9031.90.70 | 00 | Other: | | | | |
| 9031.90.70 | 00 | Of articles of subheading 9031.80.40 | X | Free | | 40% |
